Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600 C. The devices showed promisin...

Materials issues of SAW sensors for high-temperature applications

The technology of surface acoustic wave (SAW) devices allows the integration of signal processing and sensor functions within one product. In the past, SAW sensors have been operated at room temperature or 100 C–200 C at most. Material-related problems become obvious if one attempts to increase this operating temperature to a value as high as 1000 C. First experimental results will be presented...

Investigation of High-Q Resonators Embedded in Low Temperature Cofired Ceramic for Millimetre-Wave Oscillators

Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors

In order to develop a film electrode for the surface acoustic wave (SAW) devices working in high temperature, harsh environments, novel AlN/Pt/ZnO multilayers were prepared using pulsed laser deposition (PLD) systems on langasite (LGS) substrates. The AlN film was used as a protective layer and the ZnO buffer layer was introduced to improve the crystal quality of Pt films. The results show that...

Technology and applications of Low Temperature Cofired Ceramic (LTCC) based sensors and microsystems

The paper presents general information on LTCC materials, manufacturing processes and properties of fired modules. A Multichip Module package has been the main application of Low Temperature Cofired Ceramic (LTCC) technology. Recently, this technology is also used for production of sensors, actuators and microsystems. The research and development on the LTCC sensors and microsystems carried out...